硅光子学混合集成平台

2020 Opto-Electronics and Communications Conference (OECC) Pub Date : 2020-10-04 DOI:10.1109/OECC48412.2020.9273651

Chien-Chung Lin, Chien-Ying Huang, Kai-Ning Ku, K. Chou, T. Chen, Po-Chih Chang, Yu-Fang Chen, Chen-Yu Lin, Chung-Chih Wang, Chi-Sen Lee, Chih-Hsiang Hsu, Shang-Chun Chen

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引用次数: 0

摘要

在本文中，我们展示了中国工研院开发的混合硅光子平台。该平台的功能包括全晶圆高速光子测量、有源和无源器件制造以及光子封装技术。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A Hybrid Integration Platform of Silicon Photonics

In this paper, we demonstrated the hybrid silicon photonics platform developed in ITRI. The functions of this platform include full-wafer high speed photonic measurement, active and passive device fabrication, and the photonic packaging technology.

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2020 Opto-Electronics and Communications Conference (OECC)

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