D. Gloess, U. Hartung, A. Drescher, P. Frach, H. Bartzsch
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Freeform and Laser Optical Coatings by Inline Magnetron Sputtering
The upscaling of highly productive inline magnetron sputtering for precision optics and application examples like 1D and 2D lateral thickness gradients as well as laser mirrors will be presented.
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