用于微纳操作的微型三自由度柔性机构设计

2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI:10.1109/3M-NANO.2012.6472940

L. Clark, U. Bhagat, B. Shirinzadeh, P. Chea, Y. Qin, Y. Tian

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引用次数: 1

摘要

本文提出的工作重点是设计一种新型的基于柔性的机构，能够提供三自由度的平面运动。采用伪刚体建模(PRBM)和机构的运动学分析，预测了机构在X、Y和θ方向上的运动。杠杆放大是用来提高机构的位移。所提出的设计尺寸小而紧凑(约142毫米乘110毫米)。所提出的基于三自由度柔性的微型微纳机构在X、Y和θ方向上运动平稳，在X方向上的最大位移为142.09 μm，在Y方向上的最大位移为120.36 μm，在θ旋转方向上的最大位移为6.026 μm。

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Design of a miniature 3-DOF flexure-based mechanism for micro/nano manipulation

The work presented in this paper focuses on the design of a novel flexure-based mechanism capable of delivering planar motion with three degrees of freedom (3-DOF). Pseudo rigid body modeling (PRBM) and kinematic analysis of the mechanism are used to predict the motion of the mechanism in the X-, Y- and θ-directions. Lever based amplification is used to enhance the displacement of the mechanism. The presented design is small and compact in size (about 142mm by 110mm). The presented 3-DOF flexure-based miniature micro/nano mechanism delivers smooth motion in X, Y and θ, with maximum displacements of 142.09 μm in X-direction, 120.36 μm in Y-direction and 6.026 mrad in θ-rotation.

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2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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