埋极ScAlN/金刚石结构的表面声波传播特性

Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications Pub Date : 2014-12-29 DOI:10.1109/SPAWDA.2014.6998578

Qiaozhen Zhang, Tao Han, Wei-biao Wang, K. Hashimoto, Jing Chen

{"title":"埋极ScAlN/金刚石结构的表面声波传播特性","authors":"Qiaozhen Zhang, Tao Han, Wei-biao Wang, K. Hashimoto, Jing Chen","doi":"10.1109/SPAWDA.2014.6998578","DOIUrl":null,"url":null,"abstract":"In this paper, a 3D Finite Element model (FEM) of a surface acoustic wave (SAW) resonator consists of a piezoelectric thin film ScAlN /diamond layered structure with buried interdigital electrodes (IDT) was performed and analyzed using commercial software COMSOL Multiphysics, FEM software. We have done investigation on SAW propagation characteristics on the layered structures for different thickness of ScAlN film and electrode as well as different electrode materials. Simulation results showed that the maximum electromechanical coupling factor Kmax2 achieved up to be 14.35% for Rayleigh mode and 10% for Sezawa mode, which is more than two times larger than the previous report (5.48%). This work is useful for design of SAW devices with wideband and high frequency.","PeriodicalId":412736,"journal":{"name":"Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications","volume":"57 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-12-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Surface acoustic wave propagation characteristics of ScAlN/diamond structure with buried electrode\",\"authors\":\"Qiaozhen Zhang, Tao Han, Wei-biao Wang, K. Hashimoto, Jing Chen\",\"doi\":\"10.1109/SPAWDA.2014.6998578\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, a 3D Finite Element model (FEM) of a surface acoustic wave (SAW) resonator consists of a piezoelectric thin film ScAlN /diamond layered structure with buried interdigital electrodes (IDT) was performed and analyzed using commercial software COMSOL Multiphysics, FEM software. We have done investigation on SAW propagation characteristics on the layered structures for different thickness of ScAlN film and electrode as well as different electrode materials. Simulation results showed that the maximum electromechanical coupling factor Kmax2 achieved up to be 14.35% for Rayleigh mode and 10% for Sezawa mode, which is more than two times larger than the previous report (5.48%). This work is useful for design of SAW devices with wideband and high frequency.\",\"PeriodicalId\":412736,\"journal\":{\"name\":\"Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications\",\"volume\":\"57 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-12-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SPAWDA.2014.6998578\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SPAWDA.2014.6998578","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 6

摘要

本文采用COMSOL Multiphysics有限元软件，对由压电薄膜ScAlN /金刚石层状结构和埋式数字间电极(IDT)组成的表面声波(SAW)谐振器进行了三维有限元建模和分析。我们研究了不同厚度的ScAlN薄膜和电极以及不同电极材料在层状结构中的声呐传播特性。仿真结果表明，瑞利模式下最大机电耦合系数Kmax2可达14.35%，Sezawa模式下最大机电耦合系数Kmax2可达10%，比之前报道的5.48%提高了2倍以上。本文的工作对宽带高频声表面波器件的设计具有一定的指导意义。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Surface acoustic wave propagation characteristics of ScAlN/diamond structure with buried electrode

In this paper, a 3D Finite Element model (FEM) of a surface acoustic wave (SAW) resonator consists of a piezoelectric thin film ScAlN /diamond layered structure with buried interdigital electrodes (IDT) was performed and analyzed using commercial software COMSOL Multiphysics, FEM software. We have done investigation on SAW propagation characteristics on the layered structures for different thickness of ScAlN film and electrode as well as different electrode materials. Simulation results showed that the maximum electromechanical coupling factor Kmax2 achieved up to be 14.35% for Rayleigh mode and 10% for Sezawa mode, which is more than two times larger than the previous report (5.48%). This work is useful for design of SAW devices with wideband and high frequency.

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Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications

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