Geometric error based Configuration order selection for precision improvement in multi-axis motion system

The multi-axis motion system(MMS) includes optoelectronic packaging system and CNC machine tools, the quality of which mainly rely on the precision of its controlling system. The distribution and influential ability of errors in this system needs high consideration to address the precision improvement problem. This issue has become more complex due to their strict high-accuracy requirements. It is therefore increasingly important to characterize the interaction between the precision and configuration setting of MMS. In this paper, the methodology of the analytical procedures for configuration order is raised and the configuration order is highly concerned, by the proposal of the definitions of single chain and double chain, the configuration setting is analyzed systematically. By using control variate method, each motion unit and the ground unit has been developed. The tables describe the relationship between geometric errors and configuration order has been partially listed. These tables can be utilized in configuration selection and precision improvement on MMS.