基于CMOS的化学传感器批量封装技术

2008 IEEE Biomedical Circuits and Systems Conference Pub Date : 2008-11-22 DOI:10.1109/BIOCAS.2008.4696939

T. Prodromakis, P. Georgiou, T. Constandinou, K. Michelakis, C. Toumazou

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引用次数: 16

摘要

提出了一种基于CMOS的化学传感器批量封装技术。采用SU-8光刻胶作为封装剂，传感器的传感膜直接暴露在溶液中。这种方法是基于标准的光刻技术，因此可以在一个步骤中用于加工包含化学传感器的多个模具。

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Batch encapsulation technique for CMOS based chemical sensors

This paper presents a batch encapsulation technique for CMOS based chemical sensors. SU-8 photoresist is employed as the encapsulant while the sensing membrane of the sensor is directly exposed to the solution. This approach is based on standard photolithographic techniques and thus can be used for processing multiple dies containing chemical sensors in a single step.

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2008 IEEE Biomedical Circuits and Systems Conference

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