垂直隧道场效应晶体管的静电设计

J. Teherani, Tao Yu, D. Antoniadis, J. Hoyt
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引用次数: 7

摘要

隧道场效应晶体管(tfet)因其克服传统器件亚阈值摆幅的60 mV/ 10年热极限的潜力而令人兴奋,从而实现了低功率电子器件。然而,正如Seabaugh和Zhang[1]对TFET的综述所示,实验的亚阈值特性并没有达到理论预测的陡峭程度。实验器件非突然导通的可能解释包括:延伸到半导体带隙、中隙和界面阱态的长带尾(由掺杂加剧),半导体成分、应变和/或厚度的不均匀性,以及晶体管结构的非最佳静电设计。本文重点改进垂直隧穿结构(垂直向栅极方向隧穿)的静电设计,以获得更好的实验导通特性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electrostatic design of vertical tunneling field-effect transistors
Tunneling field-effect transistors (TFETs) have created excitement for their potential to overcome the 60 mV/decade thermal limit of the subthreshold swing for conventional devices enabling lower power electronics. However, as shown in the TFET review by Seabaugh and Zhang [1], experimental subthreshold characteristics have not achieved the steepness of theoretical predictions. Possible explanations for the non-abrupt turn-on of experimental devices include long band-tails (exacerbated by doping) that extend into the semiconductor band gap, mid-gap and interface trap-states, inhomogeneity of the semiconductor composition, strain and/or thickness, and non-optimal electrostatic design of the transistor structure. This paper focuses on improving the electrostatic design of vertical tunneling structures (where tunneling occurs vertically toward the gate), in order to better experimental turn-on characteristics.
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