谐振光学陀螺:单片与混合集成

C. Ciminelli, F. Dell’Olio, M. Armenise
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引用次数: 9

摘要

几十年来,角速度传感器被认为是军用和民用飞机、军舰、潜艇、卫星、空间发射器和远程弹道导弹等各种交通工具的关键设备。航空航天和国防工业对微型陀螺仪的兴趣已经引起了越来越多的研究工作,旨在通过集成光学技术实现光学陀螺仪的缩放。特别是谐振光学陀螺(ROG)已被确定为新一代光子角速度传感器的理想候选者。有两种技术方法可用于实现ROGs,即在不同基板上制造的光电元件的混合集成或在单个芯片上集成所有元件。本文对这两种方案进行了批判性的讨论和比较,并特别关注了最近在硅和磷化铟上的硅硅集成陀螺仪(陀螺片上陀螺仪,GoC)的理论和实验研究,显示出有希望的结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Resonant optical gyro: Monolithic vs. hybrid integration
Since several decades, angular velocity sensors are considered crucial devices in a wide range of vehicles such as military and civil airplanes, military ships, submarines, satellites, space launchers, and long-range ballistic missiles. The interest towards miniaturized gyroscopes for aerospace and defense industry has given rise to an increasing research effort aiming at the scaling of optical gyros through integrated optical technologies. In particular, the resonant optical gyro (ROG) has been identified as the ideal candidate for a new generation photonic angular velocity sensor. Two technological approaches are available to implement the ROGs, i.e., the hybrid integration of optoelectronic components manufactured on different substrates or the monolithic integration of all components on a single chip. The two options are critically discussed and compared in this paper with a special attention on integrated gyroscopes (gyro-on-a-chip, GoC) in silica on silicon and indium phosphide that have been recently theoretically and experimentally studied, demonstrating promising results.
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