基于压电电机的高精度定位控制系统

T. Uzunović, Edin Golubovic, Dogancan Kebude, A. Sabanoviç
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引用次数: 1

摘要

本文介绍了一种高精度控制系统的实现方法。该控制系统是针对一种可用于纳米精密应用的行走式压电电机LEGS而开发的。在控制系统结构中,由执行控制算法的数字信号控制器和为电机产生驱动电压的功率驱动器两部分组成。利用最近提出的坐标变换设计了驱动电压的波形。这种转换可以根据施加在电机杆上的力和杆的x方向轨迹剖面的设计要求合成驱动波形。在这项工作中,波形的选择是为了确保电机腿和杆之间没有相对运动,并且在一步内杆的速度恒定。控制算法称为虚拟时间控制。尽管算法简单,但它可以实现非常接近理论可实现的高精度定位。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Control system for high precision positioning applications based on piezo motors
In this paper implementation of a control system for high precision applications is presented. The control system is developed for a Piezo LEGS motor, which is a walking piezo motor that can be employed in nanometric precision applications. In the control system structure, two main components are digital signal controller which executes control algorithm and power driver that is generating driving voltages for the motor. The waveforms of the driving voltages are designed using a recently presented coordinate transformation. This transformation enables synthesis of driving waveforms according to design requirements regarding force imposed to the motor's rod and rod's x-direction trajectory profile. In this work, the waveforms are selected to ensure no relative motion between the motor's legs and rod, and constant velocity of the rod within one step. Control algorithm is named as virtual time control. Despite its simplicity, the algorithm allows high precision positioning which is very close to theoretically achievable one.
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