薄膜自由结构中弹性行波的控制

2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies Pub Date : 2009-11-13 DOI:10.1109/INTERNANO.2009.5335619

D. Nikulin, V. V. Chesnokov, D. V. Chesnokov

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引用次数: 1

摘要

本文研究了一种用于光电成像的转换显示装置。图像扫描是通过在一维微机械条形波导矩阵上传播的调制弹性波来实现的[1]。波导是通过在平行条上划分硅膜而形成的，这些平行条的两端连接在支撑硅框架上。当使用适当的压电换能器单独激励所有波导时，显示器件表面将包含N个×M浮雕元件，其中N -波导数量，M -分离弯曲变形数量

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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The control of elastic traveling waves in thin-film free structures

A converter-display device for optoelectronic imaging is considered in this work. The image scanning is carried out by modulated elastic waves traveling on a one-dimensional matrix of microme-chanical strip waveguides [1]. Waveguides are formed by dividing a silicon membrane on parallel strips, which are attached to a supporting silicon frame by their ends. When individual excitating of all waveguides using the appropriate piezoelectric transducers, the surface of the display device will contain N ×M relief elements, where N - number of waveguides, M -number of separated bending deformations

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来源期刊

2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies

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