MEMS倾角仪启动响应改进

Martin Vagner, P. Benes
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引用次数: 7

摘要

采用村田公司(Murata)生产的微机电系统(MEMS)测斜仪SCA830,设计了一种电池供电的手持式仪器,用于测量螺旋弹簧制造过程中的平行度。该倾角仪提供了一个电源关闭模式,以减少功耗,通过停止内部时钟和重置设备的控制寄存器。功率降低非常显著;然而,在输出数据中观察到瞬态响应。本文描述了一种补偿技术来抑制这种影响,从而显著减少启动时间。在这种情况下,该模型允许将启动时间缩短十倍。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Start-up response improvement for a MEMS inclinometer
A MEMS inclinometer SCA830 manufactured by Murata was used in a battery-powered handheld instrument designed for measurement of parallelism during fabrication of coil springs. The inclinometer offers a power down mode to reduce power consumption by stopping the internal clocks and resetting the control registers of the device. The power reduction is very significant; however, a transient response was observed in output data. This article describes a compensation technique to suppress this effect, and therefore significantly reduce the startup time. In this case, the model allowed to reduce the start-up time ten times.
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