K. Murakami, Hiroshi Nakamura, T. Oshino, H. Nikaido
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Tungsten/Carbon Multilayers Prepared By Ion Beam Sputtering
W/C multilayers, well known as good X-ray reflecting mirrors, were prepared by ion beam sputtering. The properties of the multilayers were investigated by low-angle X-ray diffraction, transmission electron microscopy (TEM) observation of the cross section and Auger electron spectroscopy.
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