{"title":"UCLA微制造实验室的微机电系统(MEMS)","authors":"C. Kim","doi":"10.1109/IMNC.1998.729959","DOIUrl":null,"url":null,"abstract":"Need for Education Evolved from the IC fabrication community, MEMS lacks a firm foundation in mechanical engineering. Most of the current microdevices are in concept not much more than miniaturized versions of known devices, while the physical behavior is quite different in microscale. For MEMS to fulfill its full potential, engineers need to be trained for microscale engineering. The Ph.D. program in MEMS, a formal major field in the Mechanical and Aerospace Engineering Department of UCLA. was established to address the above issue.","PeriodicalId":356908,"journal":{"name":"Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)","volume":"25 2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-07-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Microelectromechancial Systems (MEMS) At The UCLA Micromanufacturing Lab\",\"authors\":\"C. Kim\",\"doi\":\"10.1109/IMNC.1998.729959\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Need for Education Evolved from the IC fabrication community, MEMS lacks a firm foundation in mechanical engineering. Most of the current microdevices are in concept not much more than miniaturized versions of known devices, while the physical behavior is quite different in microscale. For MEMS to fulfill its full potential, engineers need to be trained for microscale engineering. The Ph.D. program in MEMS, a formal major field in the Mechanical and Aerospace Engineering Department of UCLA. was established to address the above issue.\",\"PeriodicalId\":356908,\"journal\":{\"name\":\"Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)\",\"volume\":\"25 2 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-07-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IMNC.1998.729959\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMNC.1998.729959","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Microelectromechancial Systems (MEMS) At The UCLA Micromanufacturing Lab
Need for Education Evolved from the IC fabrication community, MEMS lacks a firm foundation in mechanical engineering. Most of the current microdevices are in concept not much more than miniaturized versions of known devices, while the physical behavior is quite different in microscale. For MEMS to fulfill its full potential, engineers need to be trained for microscale engineering. The Ph.D. program in MEMS, a formal major field in the Mechanical and Aerospace Engineering Department of UCLA. was established to address the above issue.