UCLA微制造实验室的微机电系统(MEMS)

C. Kim
{"title":"UCLA微制造实验室的微机电系统(MEMS)","authors":"C. Kim","doi":"10.1109/IMNC.1998.729959","DOIUrl":null,"url":null,"abstract":"Need for Education Evolved from the IC fabrication community, MEMS lacks a firm foundation in mechanical engineering. Most of the current microdevices are in concept not much more than miniaturized versions of known devices, while the physical behavior is quite different in microscale. For MEMS to fulfill its full potential, engineers need to be trained for microscale engineering. The Ph.D. program in MEMS, a formal major field in the Mechanical and Aerospace Engineering Department of UCLA. was established to address the above issue.","PeriodicalId":356908,"journal":{"name":"Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)","volume":"25 2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-07-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Microelectromechancial Systems (MEMS) At The UCLA Micromanufacturing Lab\",\"authors\":\"C. Kim\",\"doi\":\"10.1109/IMNC.1998.729959\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Need for Education Evolved from the IC fabrication community, MEMS lacks a firm foundation in mechanical engineering. Most of the current microdevices are in concept not much more than miniaturized versions of known devices, while the physical behavior is quite different in microscale. For MEMS to fulfill its full potential, engineers need to be trained for microscale engineering. The Ph.D. program in MEMS, a formal major field in the Mechanical and Aerospace Engineering Department of UCLA. was established to address the above issue.\",\"PeriodicalId\":356908,\"journal\":{\"name\":\"Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)\",\"volume\":\"25 2 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-07-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IMNC.1998.729959\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMNC.1998.729959","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

从集成电路制造社区发展而来的MEMS缺乏坚实的机械工程基础。目前大多数微器件在概念上只不过是已知器件的小型化版本,而其物理行为在微尺度上却有很大的不同。为了让MEMS充分发挥其潜力,工程师需要接受微尺度工程方面的培训。美国加州大学洛杉矶分校机械与航空航天工程系正式专业MEMS博士项目。是为解决上述问题而设立的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Microelectromechancial Systems (MEMS) At The UCLA Micromanufacturing Lab
Need for Education Evolved from the IC fabrication community, MEMS lacks a firm foundation in mechanical engineering. Most of the current microdevices are in concept not much more than miniaturized versions of known devices, while the physical behavior is quite different in microscale. For MEMS to fulfill its full potential, engineers need to be trained for microscale engineering. The Ph.D. program in MEMS, a formal major field in the Mechanical and Aerospace Engineering Department of UCLA. was established to address the above issue.
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