Comparative Analysis of Junctionless FinFET and Inverted Mode FinFET as Phosphine (PH3) Gas Sensor

In this work, a comparative analysis of a junctionless mode FinFET and an inverted mode FinFET gas sensor is carried out. The sensors are designed to detect the presence of Phosphine (PH3) gas. The parameter used to evaluate the concentration of the gas molecules is change in gate work function. The catalytic gate material i.e. palladium is used in proposed work. The parameters used to detect the change in concentration of phosphine gas are change in threshold voltage, drain current characterstics- ON current, OFF current, transconductance, output conductance and ratio of ION/IOFF. The change in these parameters is used to study the response of Junctionless FinFET and Inverted mode FinFET as a phosphine gas sensor.