采用简化的三维制造工艺实现晶圆级波导滤波器

M. Nosrati, N. Vahabisani, M. Daneshmand
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引用次数: 0

摘要

本文讨论了一种实现片级带通波导滤波器的新技术。所提出的波导利用了一种新开发的3D制造工艺,可以在晶圆级上实现波导结构。波导滤波器可以构造在衬底上,使其独立于衬底材料。该结构适用于毫米波应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Wafer-level waveguide filter realization using simplied 3D fabricaiton process
This paper discusses a new technique to realize a wafer-level band-pass waveguide filter. The proposed waveguide takes advantage of a newly developed 3D fabrication process that enables realization of waveguide structures on wafer-level. The waveguide filter can be constructed on top of the substrate, making it independent of the substrate material. The proposed structure is suitable for millimeter-waves applications.
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