Robust adaptive displacement tracking control of a piezo-actuated stage

In this paper, an adaptive tracking controller for a piezo-actuated stage is designed considering the LUGRE model. The adaptation algorithm of the parameterized hysteretic function is used to achieve a displacement-tracking objective under the mechanical parameters uncertainties. The Lyapunov theory is used to derive an adaptive law for the system stability. The effectiveness of the proposed controller is validated considering real-time simulation. The validation results of the proposed controller presents good performances and robustness under an external load-disturbance and parameter uncertainties.