原位热处理对真空氧化铝表面闪络特性和表面状态的影响

Y. Tsukamoto, Y. Yamano, S. Kobayashi, Y. Saito
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引用次数: 7

摘要

沿固体绝缘体表面的闪络(表面闪络)阻碍了真空器件尺寸的最小化。人们一直认为,从阴极单极结处发射电子是引发表面闪络的第一步。在电子冲击的刺激下,随后绝缘子表面的气体解吸是第二次停止,最后在解吸的气体中发生表面闪络。此外,人们已经认识到,通过重复表面闪络的调理处理可以清洁绝缘子表面并提高闪络电压。因此,去除吸附气体和表面污染物可以提高表面闪络电压。在本实验中,氧化铝样品的真空热处理(约465摄氏度)被用作去除吸附气体和表面污染物的手段。AAer热处理,在真空中不暴露进行重复闪络试验。比较了热处理前后样品对大气闪络电压的变化。结果表明,热处理样品的闪络电压高于未热处理样品的闪络电压,特别是热处理样品的第一次闪络电压明显提高,热处理样品的调节eNwt也显著提高。此外,还研究了闪络电压对热处理后氧化铝纯度的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of in situ heat treatment on surface flashover characteristic and surface condition of alumina in vacuum
Flashover along the surface of a solid insulator (surface flashover) prevents minimizing the size of vacuum devices It has been considered that the emission ofelectrons from the cathode hiple junction won is the first step of initiating the surface flashover, subsequent gas desorption from insulator surface stimulated by elechon impact is the second stop and finally the surface flashover occurs in the desorbed gases In addition it has been recognized that conditioning treatment by repetitive surface flashover cleans insulator surface and brings higher flashover voltage. Therefore removal of adsorbed gas= and surface contaminants may improve surface flashover voltage. In this expetiment, vacuum heat treatment (about 465 degrees Celsius) for Alumina samples was employed as a means of removal of adsorbed gases and surface contaminants. AAer heat treatment, repetitive flashover test was conducted in vacuum without the expsure.of sample to atmosphere Flashover voltages with and without heat treatment were compared. As a mull, flashover voltage for the sample with heat treatment was higher than that for without heat treatment In particular, an appreciable improvement of first flashover voltage was confirmed for heat treatment samples significant conditioning eNwt for the sample with heat treatment was obtained as well. In addition the dependence of the flashover voltage on the purity of aluminas with heat treatment was clalified.
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