Cu-Al球键热时效形成的金属间化合物的力学性能

M.H.M. Koutersa, G.H.M. Gubbelsa, O. O'Halloranb, R. Rongenb, E.R. Weltevredena
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引用次数: 7

摘要

在大功率汽车电子中,铜线键合被认为是一级互连中最有前途的金线键合替代品,因此受到严格的功能要求。在Cu-Al球键界面中,金属间化合物的生长会使线键恶化。这些金属间化合物的热机械性能对预测其长期行为至关重要。为了确定合金的力学性能,对合金的扩散偶进行时效处理,并采用纯元素Cu和Al熔炼5种不同的金属间化合物,对样品进行高温真空退火和化学分析,以鉴定金属间化合物。给出了这些金属间化合物的硬度、压痕杨氏模量和密度。金属间化合物热机械性能的结果对于预测Cu-Al球键的长期力学行为至关重要。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Mechanical properties of intermetallics formed during thermal aging of Cu-Al ball bonds
In high power automotive electronics copper wire bonding is regarded as most promising alternative for gold wire bonding in 1st level interconnects and therefore subjected to severe functional requirements. In the Cu-Al ball bond interface the growth of intermetallic compounds may deteriorate the wire bond. The thermo-mechanical properties of these intermetallic compounds are crucial in the prediction of the long term behavior. To determine the mechanical properties diffusion couples were aged and 5 separate intermetallic compounds were melted using the pure elements Cu and Al. These samples were annealed in vacuum at high temperature and chemically analyzed in order to identify the intermetallic compounds. The measured hardness, indentation Young's moduli and densities of these intermetallic compounds are presented. Consequences of the thermo-mechanical properties of the intermetallic compounds are crucial for the prediction of the long term mechanical behavior of Cu-Al ball bonds.
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