H. Wakabayashi, S. Yamagami, N. Ikezawa, A. Ogura, M. Narihiro, K. Arai, Y. Ochiai, K. Takeuchi, Toyoji Yamamoto, T. Mogami
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Sub-10-nm planar-bulk-CMOS devices using lateral junction control
Sub-10-nm planar-bulk-CMOS devices were clearly demonstrated by a lateral source/drain (S/D) junction control using the precisely-controlled gate-electrode, shallow source/drain extensions (SDE) and steep halo. Good cut-off characteristics were observed for n/pMOSFETs with the gate length of 5 nm at 0.4 V for the first time.
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