基于Euler-Bernoulli方程的铰端微板弛豫分析

2013 5th International Conference on Intelligent Human-Machine Systems and Cybernetics Pub Date : 2013-08-26 DOI:10.1109/IHMSC.2013.274

Zhu Xiaowei, S. Liming

{"title":"基于Euler-Bernoulli方程的铰端微板弛豫分析","authors":"Zhu Xiaowei, S. Liming","doi":"10.1109/IHMSC.2013.274","DOIUrl":null,"url":null,"abstract":"In order to explore relaxation characteristic of micro-plate in MEMS, the deflection relaxation expression of micro-plate with two hinged ends was educed Based on Euler-Bernoulli equation. The deflection relaxation process of micro-plate under over-damping, critical-damping and under-damping was calculated used Maple. The relaxation simulation data of micro-plate with different length-width ratio used ANSYS conformed to theoretical calculation Based on Euler-Bernoulli equation and the relaxation time decrease significantly with the increase of width under over damping and critical damping relaxation simulation.","PeriodicalId":222375,"journal":{"name":"2013 5th International Conference on Intelligent Human-Machine Systems and Cybernetics","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Relaxation Analysis of Two Hinged Ends Micro-plate Based on Euler-Bernoulli Equation\",\"authors\":\"Zhu Xiaowei, S. Liming\",\"doi\":\"10.1109/IHMSC.2013.274\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In order to explore relaxation characteristic of micro-plate in MEMS, the deflection relaxation expression of micro-plate with two hinged ends was educed Based on Euler-Bernoulli equation. The deflection relaxation process of micro-plate under over-damping, critical-damping and under-damping was calculated used Maple. The relaxation simulation data of micro-plate with different length-width ratio used ANSYS conformed to theoretical calculation Based on Euler-Bernoulli equation and the relaxation time decrease significantly with the increase of width under over damping and critical damping relaxation simulation.\",\"PeriodicalId\":222375,\"journal\":{\"name\":\"2013 5th International Conference on Intelligent Human-Machine Systems and Cybernetics\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-08-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 5th International Conference on Intelligent Human-Machine Systems and Cybernetics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IHMSC.2013.274\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 5th International Conference on Intelligent Human-Machine Systems and Cybernetics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IHMSC.2013.274","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

为了探索MEMS中微板的弛豫特性，基于欧拉-伯努利方程推导了两端铰接微板的挠曲弛豫表达式。利用Maple计算了微板在过阻尼、临界阻尼和欠阻尼下的挠度松弛过程。ANSYS对不同长宽比微板的弛豫模拟数据符合基于Euler-Bernoulli方程的理论计算，在过阻尼和临界阻尼弛豫模拟下，随着宽度的增加，弛豫时间显著减小。

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Relaxation Analysis of Two Hinged Ends Micro-plate Based on Euler-Bernoulli Equation

In order to explore relaxation characteristic of micro-plate in MEMS, the deflection relaxation expression of micro-plate with two hinged ends was educed Based on Euler-Bernoulli equation. The deflection relaxation process of micro-plate under over-damping, critical-damping and under-damping was calculated used Maple. The relaxation simulation data of micro-plate with different length-width ratio used ANSYS conformed to theoretical calculation Based on Euler-Bernoulli equation and the relaxation time decrease significantly with the increase of width under over damping and critical damping relaxation simulation.

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2013 5th International Conference on Intelligent Human-Machine Systems and Cybernetics

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