{"title":"研究化学电阻器平台性能","authors":"L. Fišer, K. Kadlec, J. Herbst","doi":"10.1109/PC.2017.7976228","DOIUrl":null,"url":null,"abstract":"In order to make a research of chemiresistors, having a suitable platform, on which studied layer can be created and measured is a necessity. Standard sensors are built upon ceramic base equipped with electrodes and heating or tempering elements. Here at Department of Physics and Measurements a transition to a KBI2 platform made by Tesla Blatna is being conducted. This particular model was chosen because at this time it is the only available one. Main purpose of this paper is mapping its properties, especially the homogeneity of temperature of the chip and overall its dynamic thermal properties. This platform was connected into the heating circuit and readouts of its internal temperature sensor (Ptiooo) were evaluated, the temperature was also observed using an thermal imager FLIR T 400 with a macro flyleaf. Calibration of thermal camera is also discussed as well, as determination of each area emissivity. The main result is description of temperature layout all over the chip of the platform and its step responses measured out of thermographical videos taken when the heating was switched on. These data can be further used as base for temperature regulation circuits design. Also quantification of uncertainties of the internal temperature sensor and temperature gradients, which cannot be neglected during sensor layer evaluation, is based upon these data. In the acquired data, symmetrical temperature layout by longitudinal axis is observed. Problems are seen in gradient over the chips length, for operating temperature 300 °C can this difference reach up to 100 °C.","PeriodicalId":377619,"journal":{"name":"2017 21st International Conference on Process Control (PC)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Studying the chemiresistor platform properties\",\"authors\":\"L. Fišer, K. Kadlec, J. Herbst\",\"doi\":\"10.1109/PC.2017.7976228\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In order to make a research of chemiresistors, having a suitable platform, on which studied layer can be created and measured is a necessity. Standard sensors are built upon ceramic base equipped with electrodes and heating or tempering elements. Here at Department of Physics and Measurements a transition to a KBI2 platform made by Tesla Blatna is being conducted. This particular model was chosen because at this time it is the only available one. Main purpose of this paper is mapping its properties, especially the homogeneity of temperature of the chip and overall its dynamic thermal properties. This platform was connected into the heating circuit and readouts of its internal temperature sensor (Ptiooo) were evaluated, the temperature was also observed using an thermal imager FLIR T 400 with a macro flyleaf. Calibration of thermal camera is also discussed as well, as determination of each area emissivity. The main result is description of temperature layout all over the chip of the platform and its step responses measured out of thermographical videos taken when the heating was switched on. These data can be further used as base for temperature regulation circuits design. Also quantification of uncertainties of the internal temperature sensor and temperature gradients, which cannot be neglected during sensor layer evaluation, is based upon these data. In the acquired data, symmetrical temperature layout by longitudinal axis is observed. Problems are seen in gradient over the chips length, for operating temperature 300 °C can this difference reach up to 100 °C.\",\"PeriodicalId\":377619,\"journal\":{\"name\":\"2017 21st International Conference on Process Control (PC)\",\"volume\":\"48 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 21st International Conference on Process Control (PC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/PC.2017.7976228\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 21st International Conference on Process Control (PC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PC.2017.7976228","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
摘要
为了进行化学电阻器的研究,必须有一个合适的平台,可以在上面创建和测量研究层。标准传感器建立在陶瓷底座上,配有电极和加热或回火元件。在这里,物理与测量系正在过渡到特斯拉布拉特纳制造的KBI2平台。之所以选择这种特殊的型号,是因为目前它是唯一可用的型号。本文的主要目的是映射其性能,特别是芯片的温度均匀性和整体动态热性能。将该平台连接到加热电路中,评估其内部温度传感器(ptioo)的读数,并使用带有宏观飞叶的热成像仪FLIR T 400观察温度。本文还讨论了热像仪的标定,以及各区域发射率的确定。主要结果是描述了整个平台芯片上的温度布局,并通过加热时拍摄的热像学视频测量了其阶跃响应。这些数据可以进一步作为温度调节电路设计的基础。在此基础上,对传感器内部温度传感器的不确定度和温度梯度进行了量化,这在传感器层评价中是不可忽视的。在采集到的数据中,观察到沿纵轴对称的温度分布。在芯片长度的梯度中可以看到问题,对于工作温度300°C,这种差异可以达到100°C。
In order to make a research of chemiresistors, having a suitable platform, on which studied layer can be created and measured is a necessity. Standard sensors are built upon ceramic base equipped with electrodes and heating or tempering elements. Here at Department of Physics and Measurements a transition to a KBI2 platform made by Tesla Blatna is being conducted. This particular model was chosen because at this time it is the only available one. Main purpose of this paper is mapping its properties, especially the homogeneity of temperature of the chip and overall its dynamic thermal properties. This platform was connected into the heating circuit and readouts of its internal temperature sensor (Ptiooo) were evaluated, the temperature was also observed using an thermal imager FLIR T 400 with a macro flyleaf. Calibration of thermal camera is also discussed as well, as determination of each area emissivity. The main result is description of temperature layout all over the chip of the platform and its step responses measured out of thermographical videos taken when the heating was switched on. These data can be further used as base for temperature regulation circuits design. Also quantification of uncertainties of the internal temperature sensor and temperature gradients, which cannot be neglected during sensor layer evaluation, is based upon these data. In the acquired data, symmetrical temperature layout by longitudinal axis is observed. Problems are seen in gradient over the chips length, for operating temperature 300 °C can this difference reach up to 100 °C.