子孔径拼接干涉测量定位系统及点阵设计

J. Kredba, P. Psota
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引用次数: 1

摘要

现代光学系统对大口径球面和轻度非球面光学表面的质量要求不断提高。由于这些表面的孔径大小,测量它们的形状是相当有问题的。测量这些表面的方法之一是子孔径拼接干涉法。其精度在很大程度上取决于点阵设计和定位系统的精度。本文研究了干涉仪中透射元件的最优点阵设计和测量单个子孔径定位系统的坐标计算问题。利用六自由度干涉仪定位系统设置光学表面所需的方向和位置。其中三个实现为移动运动副,其余三个实现为旋转关节。本文介绍了定位系统各轴坐标系的选择以及用于确定光学曲面正确位置和方向的逆运动学。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Positioning system and lattice design for subaperture stitching interferometry
The demands on the quality of large aperture spherical and mild aspheric optical surfaces continue to rise in modern optical systems. Due to the aperture size of these surfaces measuring of their shape is quite problematic. One of the ways to measure these surfaces is the subaperture stitching interferometry. Its accuracy is highly depended on lattice design and accuracy of the positioning system. Optimal lattice design in relation to transmission element applied in interferometer together with coordinates calculation for the positioning system for measuring individual subapertures is the subject of this paper. To set the required orientation and position of the optical surface relative to the interferometer positioning system with six degrees of freedom was used. Three of them were realized as prismatic kinematic pairs and remaining three as revolution joints. In this paper the choice of coordinate systems for individual axes of the positioning system together with inverse kinematics used for setting the correct position and orientation of the optical surface are described.
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