碳纳米锥在(a-C:H)Si复合薄膜上的电子性能和热稳定性

V. Frolov, E. Zavedeev, S. Pimenov, V. Konov, E. N. Loubnin, G. Kirpilenko
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引用次数: 0

摘要

在气动扫描探针显微镜下,研究了非晶复合薄膜在纳米结构过程中的热稳定性和电子性能变化,以及环境湿度对碳纳米锥生长的影响。研究了在真空条件下对纳米锥体进行高达700℃、30 min热处理后的形状偏差。修饰区域内的电导率迅速下降,薄膜功函数增大,电场诱导的非晶纳米晶相变明显
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Carbon Nanocones on (a-C:H)Si Composite Films: Electronic Properties and Thermal Stability
Thermal stability and variations of the electronic properties of amorphous composite film during nanostructuring and the influence of ambient humidity on carbon nanocone growth were studied under an air-operated scanning probe microscopy device. Deviations of the nanocone shape subjected to heat treatments of up to 700degC for 30 min under vacuum conditions was also investigated. A rapid decrease of electroconductivity, an increase of film work function and electric field-induced amorphous-nanocrystalline phase transitions were observed inside the modified regions
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