D. Benson, Y. Xuan, J. He, Chang-Ming Lin, C.R. Hodges, E. A. Logan, T. Schaefer, B. Gilbert
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Integrated passive circuits consisting of precision thin film capacitors, resistors, and inductors optimized for RF applications have been successfully manufactured and characterized over the frequency range 50 MHz to 5 GHz. In the process of doing so, advances were made in a number of areas, including selection of substrate material for RF performance, thin film processing, simulation, and measurement techniques.
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