{"title":"微系统技术的发展","authors":"Hu Jianfei, Guo Jinjin","doi":"10.1109/ICAM.2017.8242146","DOIUrl":null,"url":null,"abstract":"Microsystem technology based on micro machining technology and integrated circuit technology has the advantages of miniaturization, integration, intelligence, low cost, high performance, mass production and so on. An overview of the composition and working principle of the microsystem, it introduces the development history of micro system technology, current situation and industrial distribution pattern, focuses on several important micro machining technology, analyses surface processing technology, bonding, LIGA technology, nano imprint technology and high aspect ratio manufacturing technology principle, characteristics and manufacturing process, explains the study of microsystem CAD, and combines with the current application of micro devices of the advantages of technology, which has a certain value for the study of microsystem technology.","PeriodicalId":117801,"journal":{"name":"2017 2nd IEEE International Conference on Integrated Circuits and Microsystems (ICICM)","volume":"102 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"The development of microsystem technology\",\"authors\":\"Hu Jianfei, Guo Jinjin\",\"doi\":\"10.1109/ICAM.2017.8242146\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Microsystem technology based on micro machining technology and integrated circuit technology has the advantages of miniaturization, integration, intelligence, low cost, high performance, mass production and so on. An overview of the composition and working principle of the microsystem, it introduces the development history of micro system technology, current situation and industrial distribution pattern, focuses on several important micro machining technology, analyses surface processing technology, bonding, LIGA technology, nano imprint technology and high aspect ratio manufacturing technology principle, characteristics and manufacturing process, explains the study of microsystem CAD, and combines with the current application of micro devices of the advantages of technology, which has a certain value for the study of microsystem technology.\",\"PeriodicalId\":117801,\"journal\":{\"name\":\"2017 2nd IEEE International Conference on Integrated Circuits and Microsystems (ICICM)\",\"volume\":\"102 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 2nd IEEE International Conference on Integrated Circuits and Microsystems (ICICM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICAM.2017.8242146\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 2nd IEEE International Conference on Integrated Circuits and Microsystems (ICICM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICAM.2017.8242146","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Microsystem technology based on micro machining technology and integrated circuit technology has the advantages of miniaturization, integration, intelligence, low cost, high performance, mass production and so on. An overview of the composition and working principle of the microsystem, it introduces the development history of micro system technology, current situation and industrial distribution pattern, focuses on several important micro machining technology, analyses surface processing technology, bonding, LIGA technology, nano imprint technology and high aspect ratio manufacturing technology principle, characteristics and manufacturing process, explains the study of microsystem CAD, and combines with the current application of micro devices of the advantages of technology, which has a certain value for the study of microsystem technology.
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