{"title":"喷雾热解制备MoO3薄膜及其气敏性能","authors":"D. V. Ahire, G. Jain","doi":"10.1109/ICSENST.2011.6137048","DOIUrl":null,"url":null,"abstract":"MoO<inf>3</inf> thin films have been prepared by a simple spray pyrolysis technique at substrate temperature 250°C. The structure and morphology of thin films are characterized by X-ray powder diffraction (XRD), scanning electron microscopy and UV-vis spectroscopy. The gas sensing properties of MoO<inf>3</inf> thin film is studied at gas concentration 400 ppm and working temperature of 100–400 °C. It was found that the sensitivity depended on the working temperatures and also H<inf>2</inf>S gas concentration. The results show that the MoO<inf>3</inf> thin film can be used to fabricate high performance H<inf>2</inf>S gas sensors.","PeriodicalId":202062,"journal":{"name":"2011 Fifth International Conference on Sensing Technology","volume":"51 3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Synthesis and gas sensing properties of MoO3 thin films by spray pyrolysis\",\"authors\":\"D. V. Ahire, G. Jain\",\"doi\":\"10.1109/ICSENST.2011.6137048\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"MoO<inf>3</inf> thin films have been prepared by a simple spray pyrolysis technique at substrate temperature 250°C. The structure and morphology of thin films are characterized by X-ray powder diffraction (XRD), scanning electron microscopy and UV-vis spectroscopy. The gas sensing properties of MoO<inf>3</inf> thin film is studied at gas concentration 400 ppm and working temperature of 100–400 °C. It was found that the sensitivity depended on the working temperatures and also H<inf>2</inf>S gas concentration. The results show that the MoO<inf>3</inf> thin film can be used to fabricate high performance H<inf>2</inf>S gas sensors.\",\"PeriodicalId\":202062,\"journal\":{\"name\":\"2011 Fifth International Conference on Sensing Technology\",\"volume\":\"51 3 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 Fifth International Conference on Sensing Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENST.2011.6137048\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 Fifth International Conference on Sensing Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENST.2011.6137048","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Synthesis and gas sensing properties of MoO3 thin films by spray pyrolysis
MoO3 thin films have been prepared by a simple spray pyrolysis technique at substrate temperature 250°C. The structure and morphology of thin films are characterized by X-ray powder diffraction (XRD), scanning electron microscopy and UV-vis spectroscopy. The gas sensing properties of MoO3 thin film is studied at gas concentration 400 ppm and working temperature of 100–400 °C. It was found that the sensitivity depended on the working temperatures and also H2S gas concentration. The results show that the MoO3 thin film can be used to fabricate high performance H2S gas sensors.
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