{"title":"基于高反射率微光束的光栅光阀:仿真设计","authors":"C. Florin, C. Tibeica, M. Purica, P. Schiopu","doi":"10.1109/SMICND.2010.5650239","DOIUrl":null,"url":null,"abstract":"In this paper are presented the results of grating light valve (GLV) structure simulation using Coventorware software in order to maximize the intensity of diffracted light in the ±1 diffraction orders. Was simulated a GLV element which consists from 6 high reflective micro-beams suspended above a silicon substrate and which are ellectrostatically actuated. By simulation are optimized the length, width and thicknesses of the micro-beam and the space between micro-beams to obtaining a deflection of »/4 at moderate value of applied voltage.","PeriodicalId":377326,"journal":{"name":"CAS 2010 Proceedings (International Semiconductor Conference)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Grating light valve based on high reflectance micro-beams: Design by simulation\",\"authors\":\"C. Florin, C. Tibeica, M. Purica, P. Schiopu\",\"doi\":\"10.1109/SMICND.2010.5650239\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper are presented the results of grating light valve (GLV) structure simulation using Coventorware software in order to maximize the intensity of diffracted light in the ±1 diffraction orders. Was simulated a GLV element which consists from 6 high reflective micro-beams suspended above a silicon substrate and which are ellectrostatically actuated. By simulation are optimized the length, width and thicknesses of the micro-beam and the space between micro-beams to obtaining a deflection of »/4 at moderate value of applied voltage.\",\"PeriodicalId\":377326,\"journal\":{\"name\":\"CAS 2010 Proceedings (International Semiconductor Conference)\",\"volume\":\"13 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"CAS 2010 Proceedings (International Semiconductor Conference)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.2010.5650239\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"CAS 2010 Proceedings (International Semiconductor Conference)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2010.5650239","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Grating light valve based on high reflectance micro-beams: Design by simulation
In this paper are presented the results of grating light valve (GLV) structure simulation using Coventorware software in order to maximize the intensity of diffracted light in the ±1 diffraction orders. Was simulated a GLV element which consists from 6 high reflective micro-beams suspended above a silicon substrate and which are ellectrostatically actuated. By simulation are optimized the length, width and thicknesses of the micro-beam and the space between micro-beams to obtaining a deflection of »/4 at moderate value of applied voltage.
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