H2O-NaOH-SiO2体系的压力-体积-温度行为及其与石英热液生长的关系

E. D. Kolb, P. Key, R. Laudise, Edith E. Simpson
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引用次数: 11

摘要

我们测量了用于生长电子石英的高压溶液中的压力-体积-温度关系,并利用这些数据为商业生产建立了安全的操作条件。高温水溶液(水热)石英生长由于其产品在电子学上的重要性,必须列为最重要的晶体生长工艺之一。我们在这里报告了一种方便的热液p-V-T测量的实验室方法,并给出了1.0 mol NaOH和1.0 mol NaOH饱和石英下的压力数据,作为温度高达450°C和30,000 psi的函数。这些结果与在生产设备上测量的压力进行了比较。结果用于确定在各种条件下气相消失的温度。用于建造高压生产高压灭菌器设备的钢在特定温度以下易碎,随着使用而缓慢增加。我们的p-V-T数据可用于确保在高压灭菌器易碎的温度下避免高压。最后,压力的下降被用来收集在生长过程中存在的溶质种类的性质的信息,并最终可以用于石英速率和完美性的研究。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Pressure-volume-temperature behavior in the system H2O-NaOH-SiO2 and its relationship to the hydrothermal growth of quartz
We have measured the pressure-volume-temperature relations in the high-pressure solutions used to grow electronic quartz and used this data to establish safe operating conditions for commercial production. High-temperature aqueous solution (hydrothermal) quartz growth, because of the importance of its product to electronics, must be ranked as one of the more important crystal-growth processes. We report here a convenient laboratory method for hydrothermal p-V-T measurements and give pressure data in 1.0-mol NaOH and in 1.0-mol NaOH saturated with quartz as a function of temperature up to 450° C and 30,000 psi. These results are compared with pressures measured on production-sized equipment. The results are used to establish the temperature at which the gas phase disappears under various conditions. The steels used for construction of high-pressure production autoclave equipment are brittle below a specific temperature, which increases slowly with service. Our p-V-T data can be used to assure that high pressures are avoided at temperatures where the autoclave is brittle. Finally, the depressions of pressure are used to glean information about the nature of the solute species present during growth, and can ultimately be of use in quartz rate and perfection studies.
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