Modeling and simulation analysis of pressure-sensing characteristics for piezoresistive pressure sensor based on graphene/hexagonal boron nitride heterostructures

Small and high-precision piezoresistive pressure sensor based on graphene/hexagonal boron nitride (h-BN) heterostructures can be embedded in aircraft airborne equipment, allowing for potential application involving fault diagnosis, prognostics and health management. In this paper, the pressure-sensing characteristics of graphene/h-BN heterostructures membrane — the relationship between pressure and strain were studied by finite element modeling and simulation method. On the one hand, the pressure-sensing characteristics models of circular, rectangular and square graphene/h-BN heterostructures membrane were established by finite element simulation software COMSOL. On the other hand, h-BN/graphene/h-BN heterostructures and monolayer graphene also have been selected for comparative analysis. The above results provide an effective quantitative guidance for the structure and performance designing of piezoresistive pressure sensors based on graphene/h-BN heterostructures.