{"title":"带有压电陶瓷换能器的光电微定位装置","authors":"I. Chilibon, M. Robu","doi":"10.1117/12.312680","DOIUrl":null,"url":null,"abstract":"This paper presents an experimental study on the behavior of piezoceramics type PZT, having a high compliance, and their application for an optoelectronic micropositioner device with piezoceramic transducer. The piezoelectric ceramics are crystallite conglomerate ferroelectrics materials with random orienting. In the laboratory we have realized PZT ceramics with various additions (Ni, Bi, Mn), presenting high compliance, for optoelectronic micropositioning device in micrometry displacements. The experimental transducers, realized like stacks of 30 divided by 35 pieces of PZT thin disks, supplied with 0 divided by 1000 V voltages, have produced 0 divided by 15 micrometers displacements.","PeriodicalId":383583,"journal":{"name":"ROMOPTO International Conference on Micro- to Nano- Photonics III","volume":"61 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-07-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Optoelectronic micropositioning device with a piezoceramic transducer\",\"authors\":\"I. Chilibon, M. Robu\",\"doi\":\"10.1117/12.312680\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents an experimental study on the behavior of piezoceramics type PZT, having a high compliance, and their application for an optoelectronic micropositioner device with piezoceramic transducer. The piezoelectric ceramics are crystallite conglomerate ferroelectrics materials with random orienting. In the laboratory we have realized PZT ceramics with various additions (Ni, Bi, Mn), presenting high compliance, for optoelectronic micropositioning device in micrometry displacements. The experimental transducers, realized like stacks of 30 divided by 35 pieces of PZT thin disks, supplied with 0 divided by 1000 V voltages, have produced 0 divided by 15 micrometers displacements.\",\"PeriodicalId\":383583,\"journal\":{\"name\":\"ROMOPTO International Conference on Micro- to Nano- Photonics III\",\"volume\":\"61 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-07-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"ROMOPTO International Conference on Micro- to Nano- Photonics III\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.312680\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"ROMOPTO International Conference on Micro- to Nano- Photonics III","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.312680","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optoelectronic micropositioning device with a piezoceramic transducer
This paper presents an experimental study on the behavior of piezoceramics type PZT, having a high compliance, and their application for an optoelectronic micropositioner device with piezoceramic transducer. The piezoelectric ceramics are crystallite conglomerate ferroelectrics materials with random orienting. In the laboratory we have realized PZT ceramics with various additions (Ni, Bi, Mn), presenting high compliance, for optoelectronic micropositioning device in micrometry displacements. The experimental transducers, realized like stacks of 30 divided by 35 pieces of PZT thin disks, supplied with 0 divided by 1000 V voltages, have produced 0 divided by 15 micrometers displacements.
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