CW-CRDS在化学气相沉积监测控制中的应用

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497) Pub Date : 2000-07-24 DOI:10.1109/LEOSST.2000.869712

D. Green, J. Looney, G. Rubloff

{"title":"CW-CRDS在化学气相沉积监测控制中的应用","authors":"D. Green, J. Looney, G. Rubloff","doi":"10.1109/LEOSST.2000.869712","DOIUrl":null,"url":null,"abstract":"Continuous wave excitation cavity ring-down spectroscopy (CW-CRDS) is being developed for real time chemical sensing of volatile CVD byproducts (e.g. HF, H/sub 2/O) and as a quantitative and robust metrology tool for advanced process control methodologies.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Application of CW-CRDS to monitor and control chemical vapor deposition\",\"authors\":\"D. Green, J. Looney, G. Rubloff\",\"doi\":\"10.1109/LEOSST.2000.869712\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Continuous wave excitation cavity ring-down spectroscopy (CW-CRDS) is being developed for real time chemical sensing of volatile CVD byproducts (e.g. HF, H/sub 2/O) and as a quantitative and robust metrology tool for advanced process control methodologies.\",\"PeriodicalId\":415720,\"journal\":{\"name\":\"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)\",\"volume\":\"28 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-07-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/LEOSST.2000.869712\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LEOSST.2000.869712","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

连续波激发腔衰荡光谱(CW-CRDS)正在开发用于挥发性CVD副产物(例如HF, H/sub 2/O)的实时化学传感，并作为先进过程控制方法的定量和稳健的计量工具。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Application of CW-CRDS to monitor and control chemical vapor deposition

Continuous wave excitation cavity ring-down spectroscopy (CW-CRDS) is being developed for real time chemical sensing of volatile CVD byproducts (e.g. HF, H/sub 2/O) and as a quantitative and robust metrology tool for advanced process control methodologies.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)

自引率

0.00%

发文量