Weiang Luo, Wenqian Yang, Huan-sheng Cheng, Dequan Yue, N. Huang, X. Zong, Y. Tang, Z. Sheng, G. Salamo, F. T. Chan
{"title":"Tl2Ba2Ca2Cu3Ox超导薄膜的制备与表征","authors":"Weiang Luo, Wenqian Yang, Huan-sheng Cheng, Dequan Yue, N. Huang, X. Zong, Y. Tang, Z. Sheng, G. Salamo, F. T. Chan","doi":"10.1117/12.190817","DOIUrl":null,"url":null,"abstract":"Superconducting Tl-Ba-Ca-Cu-O thin films have been fabricated by laser ablation. There are two steps in this process. First, an excimer laser is focused onto the Ba-Ca-Cu-O target forming a Ba-Ca-Cu-O plume. These particles are then deposited on substrate; second, the precursor films are placed into quartz tube to anneal in the presence of unfired Tl2Ba2Ca2Cu3O10 pellet to form the superconducting phase. Zero-resistance temperature Tc and critical current density Jc of the best film were 12 Ik and 1 X 106A/cm2 (at 77 K) respectively. X-ray diffraction (XRD) and secondary electron microscope (SEM) have been used to study the crystalline structure, while the composition are analyzed by high energy ion backscattering and checked with energy dispersion X-ray analysis (EDAX) and secondary ion mass spectroscopy (SIMS). Results show that these superconducting films are predominately composed of the (2223) phase and highly oriented. A platelet structure plays an important role on the quality of film.","PeriodicalId":362287,"journal":{"name":"Thin Film Physics and Applications","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-10-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Preparation and characterization of Tl2Ba2Ca2Cu3Ox superconducting thin films\",\"authors\":\"Weiang Luo, Wenqian Yang, Huan-sheng Cheng, Dequan Yue, N. Huang, X. Zong, Y. Tang, Z. Sheng, G. Salamo, F. T. Chan\",\"doi\":\"10.1117/12.190817\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Superconducting Tl-Ba-Ca-Cu-O thin films have been fabricated by laser ablation. There are two steps in this process. First, an excimer laser is focused onto the Ba-Ca-Cu-O target forming a Ba-Ca-Cu-O plume. These particles are then deposited on substrate; second, the precursor films are placed into quartz tube to anneal in the presence of unfired Tl2Ba2Ca2Cu3O10 pellet to form the superconducting phase. Zero-resistance temperature Tc and critical current density Jc of the best film were 12 Ik and 1 X 106A/cm2 (at 77 K) respectively. X-ray diffraction (XRD) and secondary electron microscope (SEM) have been used to study the crystalline structure, while the composition are analyzed by high energy ion backscattering and checked with energy dispersion X-ray analysis (EDAX) and secondary ion mass spectroscopy (SIMS). Results show that these superconducting films are predominately composed of the (2223) phase and highly oriented. A platelet structure plays an important role on the quality of film.\",\"PeriodicalId\":362287,\"journal\":{\"name\":\"Thin Film Physics and Applications\",\"volume\":\"11 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-10-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Thin Film Physics and Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.190817\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Thin Film Physics and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.190817","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
摘要
采用激光烧蚀法制备了Tl-Ba-Ca-Cu-O超导薄膜。这个过程有两个步骤。首先,准分子激光聚焦在Ba-Ca-Cu-O靶上,形成Ba-Ca-Cu-O羽流。然后这些颗粒沉积在基材上;其次,将前驱体膜置于石英管中,在未烧制的Tl2Ba2Ca2Cu3O10球团存在下进行退火,形成超导相。最佳薄膜的零阻温度Tc和临界电流密度Jc分别为12 Ik和1 X 106A/cm2 (77 K)。利用x射线衍射(XRD)和二次电子显微镜(SEM)研究了晶体结构,利用高能离子后向散射分析了晶体的组成,并用能量色散x射线分析(EDAX)和二次离子质谱(SIMS)对其进行了验证。结果表明,这些超导膜主要由(2223)相组成,具有高度的取向性。血小板结构对膜的质量起着重要的作用。
Preparation and characterization of Tl2Ba2Ca2Cu3Ox superconducting thin films
Superconducting Tl-Ba-Ca-Cu-O thin films have been fabricated by laser ablation. There are two steps in this process. First, an excimer laser is focused onto the Ba-Ca-Cu-O target forming a Ba-Ca-Cu-O plume. These particles are then deposited on substrate; second, the precursor films are placed into quartz tube to anneal in the presence of unfired Tl2Ba2Ca2Cu3O10 pellet to form the superconducting phase. Zero-resistance temperature Tc and critical current density Jc of the best film were 12 Ik and 1 X 106A/cm2 (at 77 K) respectively. X-ray diffraction (XRD) and secondary electron microscope (SEM) have been used to study the crystalline structure, while the composition are analyzed by high energy ion backscattering and checked with energy dispersion X-ray analysis (EDAX) and secondary ion mass spectroscopy (SIMS). Results show that these superconducting films are predominately composed of the (2223) phase and highly oriented. A platelet structure plays an important role on the quality of film.