吸收水对有机硅等离子体聚合物中电子输运的影响

Proceedings of the 3rd International Conference on Conduction and Breakdown in Solid Dielectrics Pub Date : 1989-07-03 DOI:10.1109/ICSD.1989.69184

J. Tyczkowski, J. Sielski

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引用次数: 5

摘要

强结合水对等离子体沉积有机硅薄膜电性能影响的研究表明，薄膜中存在两种类型的跳变中心。第一种可以被水分子破坏，第二种是稳定的。在sisi薄膜中，两种跳跃中心都存在，而在sisi薄膜中，只有第二种跳跃中心存在。然而，在SiNSi和SiOSi薄膜中，水分子激活了最初不活跃的内在受体中心。因此，在吸收了水的情况下，有机硅薄膜的导电性增加。

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Influence of absorbed water on electronic transport in organosilicon plasma polymers

Studies of the influence of strongly bound water on electrical properties of plasma-deposited organosilicon films indicate that two types of hopping centers exist in the films. The first type can be destroyed by water molecules and the second is stable. In SiNSi films both types of hopping centers exist, but in SiOSi films only the second type exists. However, in both SiNSi and SiOSi films, water molecules activate initially inactive intrinsic acceptor centers. As a result the electrical conductivity increases in organosilicon films in the presence of absorbed water.<>

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Proceedings of the 3rd International Conference on Conduction and Breakdown in Solid Dielectrics

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