S. Djordjevic, K. Shang, B. Guan, S. Cheung, Chuan Qin, L. Liao, J. Basak, Hai-Feng Liu, S. Yoo
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Athermal silicon ring modulators clad with titanium dioxide by RF magnetron sputtering
We present design, fabrication and measurement of athermal silicon ring modulators fabricated on a SOI platform, overclad with 830nm thick amorphous titanium dioxide. Current injection achieves 35 dB extinction intensity modulation.
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