一种用于远程压力监测的密封LC谐振器

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) Pub Date : 1998-07-13 DOI:10.1109/IMNC.1998.729985

Eun-Chul Park, Jun‐Bo Yoon, E. Yoon

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引用次数: 1

摘要

是一种采用本体微加工和阳极氧化技术制备的集成LC谐振腔结构。在这种谐振器结构中，通过电容式压力传感器监测压力的变化和谐振频率的变化。谐振频移通过感应外传输线圈检测;因此，可以通过被动LC无线监测眼压。有报道称，通过被动LC谐振器结构可以测量眼压，但以前的结构体积大，手工组装在混合封装中。这是第一个集成的LC谐振器传感器，它是密封在一个微机械结构。

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A Hermetically-Sealed LC Resonator For Remote Pressure Monitoring

ts an integrated LC resonator structure fabricated by using bulk micromachining and anodic Igies. In this resonator structure, pressure change is monitored by a capacitive pressure sensor le change of resonance frequency. The resonance frequency shift is detected by inductive n external transmission coil; therefore, pressure can be wirelessly monitored from passive LC s been reported that intraocular pressure can be measured by passive LC resonator structure the previous structures are bulky and manually assembled in hybrid package. This is the first integrated LC resonator sensor which is hermetically sealed in a micromachined structure.

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Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)

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