应用CT原理测量二维OTF

Yang Xiang-yang, Wu Min-shian, Chin Kuo-fan
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引用次数: 0

摘要

在光盘系统中,精确测量和评价聚焦的微光斑(通常直径小于1微米)是非常重要的。为了满足这一要求,利用CT扫描仪的概念开发了一种新的方法。刀口扫描成像平面上的斑点。将探测器接收到的信号微分到刀口下,得到二维激光光斑的一维投影。稍微转动刀口,我们可以在不同的角度得到不同的投影。测量的投影通过卷积和反投影处理,就像在CT扫描仪中做的那样。这样,我们得到了光斑的二维轮廓,即光学头的点扩散函数(PSF)。斑点的形状和大小可以直接从轮廓中得到。对PSF进行二维傅里叶变换得到光学头的OTF,它定量地描述了光学系统的质量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Measuring Two Dimensional OTF Applying CT Principle
In optical disc system, the precise measurement and evaluation of focused micro-laser-spot (usually less than lum in diameter) is very important. To meet this requirement, a new method using the concept of CT scanner has been developed. A knife-edge scans the spot on the image plane. Differentiating the signal received by the detecter under the knife-edge, we get a one-dimension (1-D) projection of 2-D laser spot. Rotating the knife-edge slightly, we can get different projections at different angles. The projections measured are processed by taking the convolution and back-projecttion, just done as in the CT scanner. In this way, we get the 2-D profiles of the spot, i.e. the Point Spread Function (PSF) of the optical head. The shape and size of the spot can be got directly from the profile. The 2-D Fourier Transform of PSF results in the OTF of the optical head, which discribes the quality of the optical system quantitatively.
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