制造微型超高频电子器件的通用电介质阳极氧化铝

Proceedings International University Conference 'Electronics and Radiophysics of Ultra-High Frequencies' (Cat. No.99EX356) Pub Date : 1999-05-24 DOI:10.1109/UHF.1999.787950

N. Mukhurov

{"title":"制造微型超高频电子器件的通用电介质阳极氧化铝","authors":"N. Mukhurov","doi":"10.1109/UHF.1999.787950","DOIUrl":null,"url":null,"abstract":"The unique aluminum oxide technology and its product-anodic alumina (AA) substrates both with and without aluminum base-hold much promise for semiconductor and vacuum microelectronics applications. The basis for successful applications of AA as a ceramic dielectric in UHF electronics is their unique electrophysical properties, which are presented in this paper.","PeriodicalId":348319,"journal":{"name":"Proceedings International University Conference 'Electronics and Radiophysics of Ultra-High Frequencies' (Cat. No.99EX356)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-05-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Universal dielectric for creation of miniature UHF electronic devices anodic alumina\",\"authors\":\"N. Mukhurov\",\"doi\":\"10.1109/UHF.1999.787950\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The unique aluminum oxide technology and its product-anodic alumina (AA) substrates both with and without aluminum base-hold much promise for semiconductor and vacuum microelectronics applications. The basis for successful applications of AA as a ceramic dielectric in UHF electronics is their unique electrophysical properties, which are presented in this paper.\",\"PeriodicalId\":348319,\"journal\":{\"name\":\"Proceedings International University Conference 'Electronics and Radiophysics of Ultra-High Frequencies' (Cat. No.99EX356)\",\"volume\":\"4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-05-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings International University Conference 'Electronics and Radiophysics of Ultra-High Frequencies' (Cat. No.99EX356)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/UHF.1999.787950\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings International University Conference 'Electronics and Radiophysics of Ultra-High Frequencies' (Cat. No.99EX356)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/UHF.1999.787950","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

独特的氧化铝技术及其产品——阳极氧化铝(AA)衬底(含铝和不含铝)在半导体和真空微电子领域的应用前景广阔。本文介绍了其独特的电物理特性，为其作为陶瓷介质在超高频电子领域的成功应用奠定了基础。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Universal dielectric for creation of miniature UHF electronic devices anodic alumina

The unique aluminum oxide technology and its product-anodic alumina (AA) substrates both with and without aluminum base-hold much promise for semiconductor and vacuum microelectronics applications. The basis for successful applications of AA as a ceramic dielectric in UHF electronics is their unique electrophysical properties, which are presented in this paper.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Proceedings International University Conference 'Electronics and Radiophysics of Ultra-High Frequencies' (Cat. No.99EX356)

自引率

0.00%

发文量