MEMS/NEMS半解析磁-结构耦合与接触分析

Digests of the 2010 14th Biennial IEEE Conference on Electromagnetic Field Computation Pub Date : 2010-05-09 DOI:10.1109/CEFC.2010.5481848

P. Pham Quang, B. Delinchant, J. Coulomb, B. du Peloux

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引用次数: 1

摘要

本文提出了一种用半解析模型求解磁结构耦合的方法和工具。针对这种耦合，我们建立了悬臂梁的结构-接触模型，并通过有限元仿真对其进行了验证。这种耦合致力于MEMS/NEMS的总体优化过程，特别是纳米开关。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Semi-analytical Magnetic-Structural coupling with contact analysis for MEMS/NEMS

This paper presents a methodology and a tool for the coupled magnetic-structural with semi-analytical models. For this coupling, the magnetic model is available, we developed the structural-contact model for the cantilever beam and valid it by finite element simulation. This coupling is dedicated to the optimization process of MEMS/NEMS in general and to nano switch in particular.

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Digests of the 2010 14th Biennial IEEE Conference on Electromagnetic Field Computation

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