早期故障筛选方法评估[asic]

T. Barrette, V. Bhide, K. de, M. Stover, E. Sugasawara
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引用次数: 27

摘要

使用自动测试设备的早期故障率筛选技术为制造老化提供了经济有效的替代方案。在本研究中,采用早期版本的0.5微米3.3伏技术制造了一个基于栅极阵列的测试车辆,其中包含140000个使用过的栅极。使用一个主要含有栅氧化缺陷的制造批次和另一个主要含有通孔和颗粒缺陷的制造批次来评估技术的有效性。当应力电压从4.7 V增加到5.0 V时,屏蔽变得更加有效。高压应力加速了弱栅氧化物(TDDB)的时间依赖性击穿。采用电压加速与IDDQ模式,然后进行IDDQ测试的屏幕比使用功能测试向量的屏幕更有效。IDDQ测试扩展了功能向量集的故障覆盖率。利用IDDQ矢量集进行应力处理,可以更好地控制应力持续时间和均匀性。它还允许独立于单个ASIC设计的尺寸或功能的通用应力时间规范。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Evaluation of early failure screening methods [ASICs]
Early failure rate screening techniques using automatic test equipment provide a cost effective alternative to manufacturing burn-in. In this investigation a gate array based test vehicle containing 140000 used gates was fabricated using early versions of a 0.5 micron 3.3 volt technology. Effectiveness of techniques was evaluated using one fabrication lot containing predominantly gate oxide defects and another one containing predominantly via and particle defects. The screen became more effective as the stress voltage was increased from 4.7 V to 5.0 V. The high voltage stress accelerated time dependent breakdown of weak gate oxide (TDDB). A screen employing voltage acceleration with IDDQ pattern followed by IDDQ test was more effective than the one using functional test vectors. The IDDQ test extended the fault coverage of a functional vector set. Stressing with the IDDQ vector set offered better control over the stress duration and uniformity. It also allowed a generic stress time specification which was independent of the size or function of an individual ASIC design.
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