一种基于200mm Si的可见光集成光子学平台

2023 Optical Fiber Communications Conference and Exhibition (OFC) Pub Date : 2023-03-01 DOI:10.23919/OFC49934.2023.10116900

W. Sacher, Yiding Lin, Hong Chen, S. S. Azadeh, Z. Yong, Xianshu Luo, H. Chua, J. Mak, Alperen Govdeli, Ankita Sharma, J. Mikkelsen, Xingdou Mu, A. Stalmashonak, Guo-qiang Lo, J. Poon

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引用次数: 1

摘要

我们提出了一种用于可见光谱(λ= 445-640nm)的单片集成光子平台，该平台具有两层氮化硅波导，硅光电二极管，高效下切热光移相器，原位修剪和电热MEMS器件。

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An Active Visible-Light Integrated Photonics Platform on 200-mm Si

We present a foundry-fabricated monolithically integrated photonics platform for the visible spectrum (λ=445–640nm) with two layers of silicon nitride waveguides, silicon photodiodes, efficient undercut thermo-optic phase shifters, in situ trimming, and electro-thermal MEMS devices.

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来源期刊

2023 Optical Fiber Communications Conference and Exhibition (OFC)

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