主动磁轴承(超)薄传感器应用的封装技术

Proceedings of the 2014 37th International Spring Seminar on Electronics Technology Pub Date : 2014-05-07 DOI:10.1109/ISSE.2014.6887577

D. Ernst, M. Melzer, D. Makarov, F. Bahr, W. Hofmann, O. Schmidt, T. Zerna

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引用次数: 9

摘要

我们在总厚度为150 μm的商用柔性双层聚酰亚胺PCB上制备了2 μm厚的铋薄膜，实现了基于霍尔效应的超薄柔性磁场传感器。这些传感器有可能应用于主动磁轴承(AMB)系统。因此，我们在这里讨论柔性霍尔传感器的可靠性问题，重点是正确选择粘合剂将传感器安装到AMB的定子上。在-40°C至165°C的标准汽车温度范围内的热冲击试验以及安装在定子上的传感器的振动试验证明了传感器的稳定性。

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Packaging technologies for (Ultra-)thin sensor applications in active magnetic bearings

We realized ultra-thin and flexible magnetic field sensors based on the Hall Effect in 2 μm thick Bismuth films prepared on commercial flexible double-layer polyimide PCB with a total thickness of 150 μm. These sensors could be potentially applied in active magnetic bearing (AMB) systems. Therefore, here we address reliability aspects of flexible Hall sensors with emphasis on the proper choice of adhesive to mount the sensor to a stator of the AMB. The thermal shock tests in the standard automotive temperature range of -40°C to 165°C as well as the vibration test of the sensor mounted to the stator has proven the sensor's stability.

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Proceedings of the 2014 37th International Spring Seminar on Electronics Technology

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