光纤上同轴ZnO薄膜BAW换能器的特性

F. Hickernell
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引用次数: 10

摘要

ZnO薄膜体声波(BAW)换能器以同轴结构沉积在光纤中,用于产生单模导光波的声光相移。在沉积过程中,通过旋转光纤来制造薄膜换能器和相关电极。根据ZnO沉积参数和光纤旋转速率的不同,进入光纤的体声波以纵向或剪切体声波为主。ZnO薄膜与光纤的结合形成了纵波和横波周期性发生驻波的谐振结构。通过测量换能器的电学特性和谐振模式,计算了ZnO薄膜和光纤的声学参数。这些参数在100 MHz到1.0 GHz的频率范围内对直径为80和125 μ m的光纤进行了测试
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The characteristics of coaxial ZnO thin-film BAW transducers on optical fibers
ZnO thin-film bulk acoustic wave (BAW) transducers, deposited in a coaxial configuration in an optical fiber, have been used to produce acoustooptic phase shifts of single mode guided optical waves. The thin-film transducers and associated electrodes are fabricated by rotating the fiber during the deposition process. Depending on the ZnO deposition parameters and the rotation rate of the fiber, longitudinal or shear bulk acoustic wave generation into the fiber was dominant. The combination of ZnO film and optical fiber forms a resonant structure in which standing-wave conditions periodically occur for the longitudinal and shear waves. Acoustic parameters of the ZnO film and the optical fiber were calculated by measuring the electrical properties of the transducer and its resonant modes. These parameters were examined over the frequency range from 100 MHz to 1.0 GHz for 80- and 125- mu m-diameter fibers.<>
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