{"title":"激光烧蚀沉积0.6Pb(Mg1/3Nb2/3)O3-0.4PbTiO3薄膜及其性能","authors":"Y. Matsumuro, Y. Oishi, M. Okuyama","doi":"10.1117/12.300704","DOIUrl":null,"url":null,"abstract":"Lead magnesium niobate titanate, 0.6Pb(Mg1/3Nb2/3)O3-0.4PbTiO3 (PMN-PT) thin films have been prepared on MgO crystal and Pt sheet at low temperatures of 450 - 600 degrees Celsius by laser ablation method. PMN-PT thin films have preferential orientation of a-axis on MgO(100) and have (100), (200) and (110) orientations on Pt. Surface morphology of PMN-PT films on Pt has the spherical grain of size 100 - 200 nm. Dielectric constants of 0.6PMN-0.4PT thin films is about 940 at 1 MHz and room temperature.","PeriodicalId":362287,"journal":{"name":"Thin Film Physics and Applications","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Deposition by laser ablation and properties of 0.6Pb(Mg1/3Nb2/3)O3-0.4PbTiO3 films\",\"authors\":\"Y. Matsumuro, Y. Oishi, M. Okuyama\",\"doi\":\"10.1117/12.300704\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Lead magnesium niobate titanate, 0.6Pb(Mg1/3Nb2/3)O3-0.4PbTiO3 (PMN-PT) thin films have been prepared on MgO crystal and Pt sheet at low temperatures of 450 - 600 degrees Celsius by laser ablation method. PMN-PT thin films have preferential orientation of a-axis on MgO(100) and have (100), (200) and (110) orientations on Pt. Surface morphology of PMN-PT films on Pt has the spherical grain of size 100 - 200 nm. Dielectric constants of 0.6PMN-0.4PT thin films is about 940 at 1 MHz and room temperature.\",\"PeriodicalId\":362287,\"journal\":{\"name\":\"Thin Film Physics and Applications\",\"volume\":\"23 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-02-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Thin Film Physics and Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.300704\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Thin Film Physics and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.300704","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Deposition by laser ablation and properties of 0.6Pb(Mg1/3Nb2/3)O3-0.4PbTiO3 films
Lead magnesium niobate titanate, 0.6Pb(Mg1/3Nb2/3)O3-0.4PbTiO3 (PMN-PT) thin films have been prepared on MgO crystal and Pt sheet at low temperatures of 450 - 600 degrees Celsius by laser ablation method. PMN-PT thin films have preferential orientation of a-axis on MgO(100) and have (100), (200) and (110) orientations on Pt. Surface morphology of PMN-PT films on Pt has the spherical grain of size 100 - 200 nm. Dielectric constants of 0.6PMN-0.4PT thin films is about 940 at 1 MHz and room temperature.
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