用于空气动力学的管状微纳米传感器和致动器

2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies Pub Date : 2009-11-13 DOI:10.1109/INTERNANO.2009.5335627

V. Seleznev, V. Prinz, Vladimir A. Aniskin, A. Shiplyuk

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引用次数: 0

摘要

本文报道了半导体微纳米管的制备和研究的新进展，以及微纳米管作为传感器和执行器基本元件的应用。介绍了管状微纳米传感器和执行器的制备方法，并给出了制备器件的实例。论证了自制先导装置在气动应用中的潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Tubular micro- and nano- sensors and actuators for aerodynamics

New data on the fabrication and study of semiconductor micro- and nanotubes, and also on the application of such micro- and nanotubes as basic elements in sensors and actuators are reported. Fabrication methods for tubular micro- and nanosensors and actuators are described, and examples of fabricated devices are presented. The potential offered by the fabricated pilot devices in aerodynamic applications is demonstrated.

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2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies

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