{"title":"用于商用SOI技术的2000°/s动态范围体模十二角陀螺仪","authors":"M. Elsayed, F. Nabki, M. El-Gamal","doi":"10.1109/ICECS.2011.6122264","DOIUrl":null,"url":null,"abstract":"This paper reports on the design and suggested fabrication steps of a bulk mode dodecagon disk gyroscope. A major contribution of this work, compared to prior art, is that it enables the fabrication of this important class of gyroscopes in commercially available and low-cost SOI technologies — e.g. MEMSCAP's SOIMUMPs. The structure was simulated using COMSOL, operates at 8.14 MHz, and exhibits a competitive rate sensitivity of ∼2.3 pA/°/s, a high dynamic range of 2000°/s, and a mechanical noise of 1°/√hr, for a quality factor of 10,000.","PeriodicalId":251525,"journal":{"name":"2011 18th IEEE International Conference on Electronics, Circuits, and Systems","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":"{\"title\":\"A 2000°/s dynamic range bulk mode dodecagon gyro for a commercial SOI technology\",\"authors\":\"M. Elsayed, F. Nabki, M. El-Gamal\",\"doi\":\"10.1109/ICECS.2011.6122264\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports on the design and suggested fabrication steps of a bulk mode dodecagon disk gyroscope. A major contribution of this work, compared to prior art, is that it enables the fabrication of this important class of gyroscopes in commercially available and low-cost SOI technologies — e.g. MEMSCAP's SOIMUMPs. The structure was simulated using COMSOL, operates at 8.14 MHz, and exhibits a competitive rate sensitivity of ∼2.3 pA/°/s, a high dynamic range of 2000°/s, and a mechanical noise of 1°/√hr, for a quality factor of 10,000.\",\"PeriodicalId\":251525,\"journal\":{\"name\":\"2011 18th IEEE International Conference on Electronics, Circuits, and Systems\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"11\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 18th IEEE International Conference on Electronics, Circuits, and Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICECS.2011.6122264\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 18th IEEE International Conference on Electronics, Circuits, and Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICECS.2011.6122264","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A 2000°/s dynamic range bulk mode dodecagon gyro for a commercial SOI technology
This paper reports on the design and suggested fabrication steps of a bulk mode dodecagon disk gyroscope. A major contribution of this work, compared to prior art, is that it enables the fabrication of this important class of gyroscopes in commercially available and low-cost SOI technologies — e.g. MEMSCAP's SOIMUMPs. The structure was simulated using COMSOL, operates at 8.14 MHz, and exhibits a competitive rate sensitivity of ∼2.3 pA/°/s, a high dynamic range of 2000°/s, and a mechanical noise of 1°/√hr, for a quality factor of 10,000.
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