高分辨率色散抗蚀剂，适用于高级滤色器应用

Proceedings of 5th Asian Symposium on Information Display. ASID '99 (IEEE Cat. No.99EX291) Pub Date : 1999-03-19 DOI:10.1109/ASID.1999.762781

Rong-Jer Lee, Jr-Cheng Fan, Tzong-Shing Cheng, Jung-Lung Wu

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引用次数: 2

摘要

一种由有机颜料和化学放大抗蚀剂系统组成的积极工作颜料分散抗蚀剂，设计用于高分辨率彩色滤光片，其精细图案小于5 /spl μ m的线和空间。它还显示出高亮度和良好的色彩再现性。还合成了一种包括酸不稳定基团和芳香官能团的丙烯酸结合剂，其具有酸催化解封和与颜料良好相容性的功能。

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Pigment-dispersed color resist with high resolution for advanced color filter application

A positive working pigment-dispersed color resist comprising organic pigments and a chemically amplified resist system is designed for a high resolution color filter with fine patterns of less than 5 /spl mu/m lines and spaces. It also shows high brightness and good color reproducibility. An acrylic binder including an acid labile group and an aromatic function group that have both functions of acid catalysed unblocking and good compatibility with pigments is also synthesized.

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来源期刊

Proceedings of 5th Asian Symposium on Information Display. ASID '99 (IEEE Cat. No.99EX291)

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