硅太阳能电池工艺及性能参数优化的仿真与计算机辅助设计

H. Muthurajan, D. Lai, C. Tan
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引用次数: 1

摘要

我们开发了一个基于扩散过程参数和手指总线设计参数模拟太阳能电池性能参数的软件包。该软件包中包含的计算机辅助设计(CAD)算法可用于设计和优化手指总线尺寸以实现最佳太阳能收集。该软件包的CAD算法可以将优化后的手指总线设计保存为。dxf格式,然后可以直接用作丝网印刷,CMOS光刻或电子束书写机的金属化层掩模制作的布局。我们的软件包生成的。dxf格式文件也可以使用其他CAD软件(如AutoCAD、L-Edit等)查看。该软件包还根据工艺参数——POCl3扩散温度、POCl3扩散反应持续时间、退火温度和退火持续时间,模拟了掺杂多晶硅层的片材电阻率。本文介绍了上述新型软件中引入的新算法,以及工艺参数的优化和手指总线的设计。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Simulation and computer aided design of silicon solar cells for process and performance parameters optimization
We have developed a novel software package which is able to simulate the performance parameters of the solar cells based on diffusion process parameters as well as finger-bus design parameters. An algorithm for computer aided design (CAD) incorporated in this software package is useful for designing and optimizing the finger-bus dimension for optimum solar energy harvesting. The CAD algorithm of this software package can save the optimized finger-bus design in a .dxf format which can then be directly used as layout for mask making of the metallization layers using screen printing, CMOS based lithography or e-beam writer. The .dxf format file generated by our software package can also be viewed using other CAD softwares such as AutoCAD, L-Edit, etc. This software package also simulate the sheet resistivity of the doped poly-silicon layer based on the process parameters — POCl3 diffusion temperature, duration of POCl3 diffusion reaction, annealing temperature and annealing duration. This research paper presents the new algorithm incorporated in the novel software as discussed above as well as the optimization of the process parameters and finger-bus design.
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