采用SU-8光刻胶作导层，具有稳定温度特性的爱波延迟线器件

Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications Pub Date : 2014-12-29 DOI:10.1109/SPAWDA.2014.6998607

Xiao Xie, Gui Chen, Wen Wang, S. He

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引用次数: 0

摘要

研究了SU-8光刻胶涂层爱波器件在0 ~ 120℃范围内的温度特性。在ST-90°X石英衬底上制备了表面掠掠体波(SSBW)和爱波延迟线器件。研究了SU-8厚度对插入损耗和近零温度频率系数(TCF)温度范围的影响。在150MHz范围内演示了在60°C至100°C范围内具有-15.5dB至-22.4dB插入损耗和接近零TCF的Love波器件。

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Love wave delay line devices with tenable temperature characteristics using SU-8 photoresist as guiding layer

Temperature characteristics of SU-8 photoresist coated love wave devices are presented from 0 °C to 120 °C. Surface skimming bulk wave (SSBW) and love wave delay line devices were fabricated on the ST-90°X quartz substrate. Effects of SU-8 thickness on insertion loss and temperature range of near-zero temperature coefficient of frequency (TCF) are investigated. Love wave devices with -15.5dB to -22.4dB insertion loss and near zero TCF from 60 °C to 100°C are demonstrated in the 150MHz range.

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Proceedings of the 2014 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications

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