基于Sentaurus TCAD的新型增强型垂直GaN纳米线晶体管的设计与优化

M. Benjelloun, Nedal Al Taradeh, C. Rodriguez, N. Gogneau, A. Soltani, D. Morris, J. Harmand, H. Maher
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引用次数: 0

摘要

利用TCAD工具设计并优化了一种新型的增强型垂直GaN纳米线晶体管结构。分析了直径、长度和掺杂浓度对沟道和漂移区的影响。对于沟道区域,当纳米线直径小于200 nm,沟道掺杂量小于1×1017 cm−3时,器件正常关闭。当考虑受体型表面陷阱密度为1×1013 cm−2时。eV−1,阈值电压Vth略有升高。该器件的击穿电压(VBR)随漂移区长度的增加和纳米线直径的减小而增加。仿真结果表明,当考虑表面陷阱时,器件的导态电阻(RON)在漂移区的低掺杂水平下急剧增加。随着纳米线直径的减小,掺杂水平的阈值随着纳米线直径的减小而增加,在该阈值之上,RON保持较小且对表面陷阱不敏感。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Design and Optimization of New Enhanced Vertical GaN Nanowire Transistor Using Sentaurus TCAD for Power Applications
A novel enhanced vertical GaN nanowire transistor structure is designed and optimized using the TCAD tool. The impact of the diameter, length, and doping concentration has been analyzed for the channel and drift region parts with and without surface traps. For the channel region, it has been observed that the device is Normally-OFF when the nanowire’s diameter and channel doping are less than 200 nm and 1×1017 cm−3, respectively. When considering a density of acceptor-type surface traps of 1×1013 cm−2.eV−1, the threshold voltage (Vth) has slightly increased. The breakdown voltage (VBR) of the device is found to increase as the length of the drift region increases and as the diameter of the nanowire decreases. Our simulation results show that the on-state resistance (RON) of the device increases drastically at low doping level of the drift region, when surface traps are taken into account. The threshold value of the doping level, above which RON remains small and insensitive to surface traps, increases as the nanowire diameter decreases.
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