适用于可重构天线应用的系列射频MEMS开关的设计

2017 International Conference on Circuit ,Power and Computing Technologies (ICCPCT) Pub Date : 2017-04-01 DOI:10.1109/ICCPCT.2017.8074405

Raji George, C. R. S. Kumar, S. Gangal

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引用次数: 10

摘要

本文设计并仿真了射频MEMS开关在可重构天线中的应用。射频MEMS开关正在取代传统的半导体开关，如FET和PIN二极管，用于天线的重新配置。采用有限元软件(FEM)对射频MEMS开关进行仿真。分析了不同射频MEMS开关的结构。利用该软件对开关的设计进行了优化，以达到最小的拉入电压。比较了各设计方案的拉入电压。本文介绍了具有金属触点的系列射频MEMS开关，该开关可确保其在直流至12 GHz范围内工作。开关是在硅衬底上制造的。对相同尺寸膜的设计进行了模拟。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Design of series RF MEMS switches suitable for reconfigurable antenna applications

In this paper, RF MEMS switches are designed and simulated for applications in reconfigurable antennas. RF MEMS switches are replacing the traditional semiconductor switches such as FET and PIN diodes which were used with antennas for reconfiguration. The Coventorware software (FEM) is used for the simulation of the RF MEMS switch. The configuration of the different RF MEMS switches are analyzed. Using this software the optimization of the design of the switches are performed for minimum pull in voltage. The pull in voltage for the proposed designs is compared. This paper presents series RF MEMS switches that have a metal contact which ensures its operation from DC to 12 GHz. The switches are fabricated on a Silicon substrate. The designs are simulated for same dimension of the membrane.

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2017 International Conference on Circuit ,Power and Computing Technologies (ICCPCT)

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